METHOD AND SYSTEM FOR PLASMA SIMULATION USING MACHINE LEARNING

Title:

METHOD AND SYSTEM FOR PLASMA SIMULATION USING MACHINE LEARNING

Document Type and Number:

WIPO Patent Application WO/2023/210854

Kind Code:

A1

Abstract:

In order to address the issue described, a simulation method, according to the present invention, comprises the steps of: calculating a first result value for a plasma process by inputting at least one parameter related to a plasma process to a machine learning model; simulating the plasma process so that a second result value is calculated by means of the first result value calculated through the machine learning model; and outputting a prediction result for the plasma process in an electronic device by using at least one of the first result value and the second result value according to whether the simulation converges within a preset time.

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Inventors:

KWON DEUK CHUL (KR)
CHUNG SANG YOUNG (KR)

Application Number:

PCT/KR2022/006819

Publication Date:

November 02, 2023

Filing Date:

May 12, 2022

Export Citation:

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Assignee:

KOREA INST OF FUSION ENERGY (KR)

International Classes:

H01J37/32; G06N3/08; G06N20/00

Foreign References:

KR20220023034A	2022-03-02
KR20050019231A	2005-03-03
KR20020057664A	2002-07-12
JP2015001769A	2015-01-05
KR20210042633A	2021-04-20

Attorney, Agent or Firm:

IP LAB PATENT LAW FIRM (KR)

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