Title:
METHOD AND SYSTEM FOR TEMPERATURE CONTROL OF A SUBSTRATE
Document Type and Number:
WIPO Patent Application WO2004095531
Kind Code:
A3
Abstract:
A substrate holder for supporting a substrate in a processing system and controlling the temperature thereof is described. The substrate holder (120) comprises a first heating element (130) positioned in a first region for elevating the temperature of the first region. A second heating elemen (140) positioned in a second region is configured to elevate the temperature in the second region. Furthermore, a first controllably insulating element (150) is positioned below the first heating element, and is configured to control the transfer of heat between the substrate and at least one cooling element (170) positioned therebelow in the first region. A second controllably insulating element (160) is positioned below the second heating element and is configured to control the transfer of heat between the substrate and at least one cooling element positioned therebelow in the second region.
Inventors:
MITROVIC ANDREJ (US)
Application Number:
PCT/US2004/006078
Publication Date:
October 27, 2005
Filing Date:
March 17, 2004
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
MITROVIC ANDREJ (US)
MITROVIC ANDREJ (US)
International Classes:
H01L21/00; (IPC1-7): B23K10/00
Foreign References:
| US6080969A | 2000-06-27 | |||
| US6847014B1 | 2005-01-25 | |||
| US5958140A | 1999-09-28 | |||
| US6886976B2 | 2005-05-03 | |||
| US6639189B2 | 2003-10-28 |
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