Title:
METHOD AND SYSTEM OF ON-TOOL AND ON-SITE MFC OPTIMIZATION PROVIDING CONSISTENT RESPONSE
Document Type and Number:
WIPO Patent Application WO/2011/135826
Kind Code:
A1
Abstract:
One method of obtaining an initial adjusted mass flow controller valve start position comprises obtaining a mass flow controller delay period and setting a mass flow controller valve to an initial valve opening position that is less than an expected optimal valve opening position. An initial desired flow rate and initial operating conditions are input into a control system that is in communication with the valve, and the control system is initiated. The control system is adapted to adjust the valve opening position to achieve the initial desired flow rate, while taking into account flow rate and valve position feedback to the control system. During operation of the MFC and control system, the valve position and the flow rate are recorded in one embodiment and a flow rate that one of meets and exceeds a threshold is detected. An initial-flow time-period extending from the time of control system initiation to detection of the threshold being one of met and exceeded is determined and the mass flow controller delay period from the initial flow time period is subtracted from the initial-flow time-period to obtain an adjusted start time. The valve opening position at the adjusted start time is set as the initial adjusted mass flow controller valve start position.
Inventors:
SMIRNOV V ALEXEI (US)
Application Number:
PCT/JP2011/002408
Publication Date:
November 03, 2011
Filing Date:
April 25, 2011
Export Citation:
Assignee:
HITACHI METALS LTD (JP)
SMIRNOV V ALEXEI (US)
SMIRNOV V ALEXEI (US)
International Classes:
G05D7/06
Foreign References:
| JPH09171412A | 1997-06-30 | |||
| JPS63104113A | 1988-05-09 |
Attorney, Agent or Firm:
OHNO, Seiji et al. (Marunouchi Kitaguchi Building 21F 6-5, Marunouchi 1-chome, Chiyoda-k, Tokyo 05, JP)
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Claims: