METHOD AND SYSTEM FOR VISUALIZING SURFACE ERRORS

WIPO Patent Application WO/2003/032129

A8

A method and system for visualizing deviations on an actual surface (10) from a nominal, or designed, surface utilizes a system and method for mapping the spatial (e.g. x, y and z) coordinates of the actual surface (10) into a computer (13), comparing the mapped actual surface (10) to the nominal surface to produce a three-dimensional distribution of deviation values (D), processing this distribution into a topographical pattern (34) of multiple contours or areas (34a... 34n), each contour or area having the same, or generally the same, deviation value (D), and optically projecting this topographical pattern (34) onto the actual surface (10) in registry with the initial surface mapping to provide a display of the surface deviations (D) directly on the actual surface (10). The deviations are measured along a direction D normal to the actual surface so that the three-dimensional distribution is given in x, y, D coordinates. The optical projection is preferably a laser projection (38). The mapping and projection onto the actual surface (10) are made, and coordinated with one another, with respect to three reference points (32) on the surface (10).

JPH10170238	IDENTIFYING METHOD FOR ABNORMAL OUTLINE OF OBJECT AND ITS DEVICE
JP2524000	[Title of Invention] Pattern Inspection Device

KAUFMAN STEVEN P (US)
SAVIKOVSKY ARKADY (US)

PCT/US2002/032520

February 02, 2012

October 11, 2002

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LASER PROJECTION TECHNOLOGIES INC A DELAWARE CORP (US)
KAUFMAN STEVEN P (US)
SAVIKOVSKY ARKADY (US)

G01B11/24; G01B11/25; G03B31/00; G06K9/00

MANUS, Peter, J. et al. (a LimitedLiability Partnership,P.O. Box 916, Boston MA, US)

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