Title:
METHOD FOR TESTING COLUMNAR SELF-ASSEMBLED THIN FILM STRUCTURE AND PREPARATION METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2020/087888
Kind Code:
A1
Abstract:
A method for testing a columnar self-assembled thin film structure comprises: separately constructing a material A and an interface structure "a" that has the greatest stability with respect to a substrate, and a material B and an interface structure "b" that has the greatest stability with respect to the substrate; separately calculating interface binding energy (EfA) of the interface structure "a" and interface binding energy (EfB) of the interface structure "b"; and calculating the difference between the interface binding energy (EfA) and the interface binding energy (EfB), wherein if the difference is greater than zero, the material A forms a nanopillar to be embedded in the material B, and if the difference is less than zero, the material B forms a nanopillar to be embedded in the material A. The method for determining a vertical columnar self-assembled thin film structure is used to predetermine the structure of a vertical columnar self-assembled thin film, thereby selectively preparing a vertical columnar self-assembled thin film, conserving raw materials, and improving productivity.
Inventors:
JIANG JIE (CN)
YANG QIONG (CN)
ZHOU YICHUN (CN)
YANG QIONG (CN)
ZHOU YICHUN (CN)
Application Number:
PCT/CN2019/084013
Publication Date:
May 07, 2020
Filing Date:
April 24, 2019
Export Citation:
Assignee:
UNIV XIANGTAN (CN)
International Classes:
B81B1/00; B81B7/00
Foreign References:
| CN109179311A | 2019-01-11 | |||
| CN105084305A | 2015-11-25 | |||
| US20140034132A1 | 2014-02-06 | |||
| CN106277822A | 2017-01-04 | |||
| CN107194037A | 2017-09-22 |
Attorney, Agent or Firm:
BEIJING LINKAW PATENT ATTORNEY LAW FIRM (CN)
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