METHOD OF TURNING CONDENSER MICROPHONE INTO ELECTRET, ELECTRET-TURNING DEVICE AND METHOD OF PRODUCING CONDENSER MICROPHONE USING THIS

Title:

METHOD OF TURNING CONDENSER MICROPHONE INTO ELECTRET, ELECTRET-TURNING DEVICE AND METHOD OF PRODUCING CONDENSER MICROPHONE USING THIS

Document Type and Number:

WIPO Patent Application WO/2006/132193

Kind Code:

A1

Abstract:

A novel electret-turning technology for a silicon microphone capable of easily turning the dielectric film of a condenser microphone formed by micro-processing a silicon substrate into electret, and accommodating variations in microphone sensitivity caused by changes in production and component characteristics. A silicon microphone chip is completed, which is then mounted on a mounting substrate, and as it is kept mounted, each one of dielectric films in the silicon microphone chip is individually turned into electret by corona discharge by one needle electrode (51). A plurality of times of electret-turning operations, that is, a second electret-turning quantity and thereafter, are properly determined based on actual measurement results of microphone sensitivity, whereby dielectric films are accurately and efficiently turned into electret.

Inventors:

TAKEUCHI YUSUKE
OGURA HIROSHI
MAKIHATA KATUHIRO

Application Number:

PCT/JP2006/311248

Publication Date:

December 14, 2006

Filing Date:

June 05, 2006

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC IND CO LTD (JP)
TAKEUCHI YUSUKE
OGURA HIROSHI
MAKIHATA KATUHIRO

International Classes:

H04R19/01; H01G7/02; H04R31/00

Foreign References:

JP2003047095A	2003-02-14
JPS5658220A	1981-05-21
JPH1188992A	1999-03-30
JP2005020411A	2005-01-20
JP2000508860A	2000-07-11
US4302633A	1981-11-24
US4014091A	1977-03-29

Other References: