Title:
METHOD FOR TWO-SIDED POLISHING OF WORKPIECE AND DEVICE FOR TWO-SIDED POLISHING OF WORKPIECE
Document Type and Number:
WIPO Patent Application WO/2022/259813
Kind Code:
A1
Abstract:
In the present invention, the optimal value for an inter-plate distance is calculated on the basis of relationship data indicating the relationship between the flatness of a workpiece and an inter-plate distance which is the distance between an upper plate and a lower plate at at least two locations each having a different distance from the center of a rotating plate.
By controlling the shape of the rotating plate, the inter-plate distance can be controlled so as to achieve the optimal value.
Inventors:
KURAMOTO RYO (JP)
GOTO TAIKI (JP)
GOTO TAIKI (JP)
Application Number:
PCT/JP2022/020108
Publication Date:
December 15, 2022
Filing Date:
May 12, 2022
Export Citation:
Assignee:
SUMCO CORP (JP)
International Classes:
B24B37/005; B24B37/08; B24B49/10; H01L21/304
Foreign References:
| JP2020171997A | 2020-10-22 | |||
| JP2020171996A | 2020-10-22 | |||
| JP2021010952A | 2021-02-04 | |||
| CN112847124A | 2021-05-28 |
Attorney, Agent or Firm:
SUGIMURA Kenji (JP)
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