Title:
METHOD FOR VACUUM DRYING OF FILM AND DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/210042
Kind Code:
A1
Abstract:
A method for vacuum drying of a film. The method comprises: placing a substrate (1) on which a film material (2) is formed in a vacuum drying environment, the film material (2) comprising a solvent and solute used for forming a film; in a first phase, evaporating and condensing the solvent in the film material (2) on an upper cover plate (3), the film material (2) still comprising a specific quantity of solvent, so that a soft film having fluidity is formed; in a second phase, further condensing a part of the solvent condensed on the upper cover plate (3) on the substrate (1), so that the fluidity of the soft film on the substrate (1) is increased; and repeating the first phase and the second phase, and vacuumizing after a film having a substantially flat surface is formed, so that the solvent is completely evaporated and the film is solidified. Also disclosed are a method for forming a film and a display device.
Inventors:
HSU MING HUNG (CN)
Application Number:
PCT/CN2018/078880
Publication Date:
November 22, 2018
Filing Date:
March 13, 2018
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO LTD (CN)
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO LTD (CN)
International Classes:
C23C14/58; C23C14/12; H01L51/56
Foreign References:
| CN107201504A | 2017-09-26 | |||
| KR20140003811A | 2014-01-10 | |||
| JPH0743066A | 1995-02-10 | |||
| US20140290090A1 | 2014-10-02 |
Attorney, Agent or Firm:
BEIJING INTELLEGAL INTELLECTUAL PROPERTY AGENT LTD. (CN)
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