Title:
METHOD FOR VACUUM-EXHAUSTING BY MEANS OF CRYOPUMP
Document Type and Number:
WIPO Patent Application WO/2024/085434
Kind Code:
A1
Abstract:
A method for vacuum-exhausting by means of a cryopump comprising a freezer, which is provided with a first stage part and a second stage part and cools the first stage part and the second stage part, a cryopanel, which includes a first stage panel cooled by the first stage part and a second stage panel cooled by the second stage part, a cryopump container, which surrounds the cryopanel, a first heater, which is installed in the first stage part, and a second heater, which is installed in the second stage part, comprises the steps of: receiving an injection signal for a process gas from a process gas injection device for injecting the process gas into a process chamber; raising the temperature of the first stage part by turning on the first heater on the basis of the injection signal; measuring the temperature of the first stage part; monitoring whether the temperature of the first stage part reaches a preset first stage reference temperature; and vacuum-exhausting the process gas when the temperature of the first stage part reaches the preset first stage reference temperature.
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Inventors:
CHO SEONG HYEON (KR)
YANG WON KYUN (KR)
AHN KYUNG JOON (KR)
YANG WON KYUN (KR)
AHN KYUNG JOON (KR)
Application Number:
PCT/KR2023/013434
Publication Date:
April 25, 2024
Filing Date:
September 07, 2023
Export Citation:
Assignee:
CRYO H&I INC (KR)
International Classes:
F04B37/08; F04B49/06; F04B53/08; F04B53/16
Attorney, Agent or Firm:
MAPS INTELLECTUAL PROPERTY LAW FIRM (KR)
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