Title:
METHOD OF WORKING SINTERED DIAMOND, CUTTER WHEEL FOR SUBSTRATE AND METHOD OF WORKING THE SAME
Document Type and Number:
WIPO Patent Application WO/2006/082899
Kind Code:
A1
Abstract:
A method of laser microfabrication of sintered diamond, in which highly efficient precision microfabrication can be accomplished while inhibiting any graphitization at work site. There is provided a method comprising the step of irradiating a wheel circumferential part including ridge line portion (2a) from the wheel side face with laser beams making relative move to the wheel (2) so that at the ridge line portion, minute groove portions opening in the direction of wheel radius are continuously formed with desirable intervals in the circumferential direction, wherein a workpiece of sintered diamond material is wrought in fine form through irradiating of the work site of the workpiece with laser beams exhibiting a relative moving rate to the workpiece so that the maximum thickness of the work site is ≤ 200 μm.
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Inventors:
Kondo, Mikio c/o MITSUBOSHI DIAMOND INDUSTRIAL CO. (LTD. 2-12-12 Minami-Kanede, Suita-city Osaka 44, 56400, JP)
Kuriyama, Kazuhisa c/o MITSUBOSHI DIAMOND INDUSTRIAL CO. (LTD. 2-12-12 Minami-Kanede, Suita-city Osaka 44, 56400, JP)
Tomimori, Hiroshi c/o MITSUBOSHI DIAMOND INDUSTRIAL CO. (LTD. 2-12-12 Minami-Kanede, Suita-city Osaka 44, 56400, JP)
Kuriyama, Kazuhisa c/o MITSUBOSHI DIAMOND INDUSTRIAL CO. (LTD. 2-12-12 Minami-Kanede, Suita-city Osaka 44, 56400, JP)
Tomimori, Hiroshi c/o MITSUBOSHI DIAMOND INDUSTRIAL CO. (LTD. 2-12-12 Minami-Kanede, Suita-city Osaka 44, 56400, JP)
Application Number:
PCT/JP2006/301783
Publication Date:
August 10, 2006
Filing Date:
February 02, 2006
Export Citation:
Assignee:
MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. (2-12-12, Minami-Kaneden Suita-cit, Osaka 44, 56400, JP)
Kondo, Mikio c/o MITSUBOSHI DIAMOND INDUSTRIAL CO. (LTD. 2-12-12 Minami-Kanede, Suita-city Osaka 44, 56400, JP)
Kuriyama, Kazuhisa c/o MITSUBOSHI DIAMOND INDUSTRIAL CO. (LTD. 2-12-12 Minami-Kanede, Suita-city Osaka 44, 56400, JP)
Tomimori, Hiroshi c/o MITSUBOSHI DIAMOND INDUSTRIAL CO. (LTD. 2-12-12 Minami-Kanede, Suita-city Osaka 44, 56400, JP)
Kondo, Mikio c/o MITSUBOSHI DIAMOND INDUSTRIAL CO. (LTD. 2-12-12 Minami-Kanede, Suita-city Osaka 44, 56400, JP)
Kuriyama, Kazuhisa c/o MITSUBOSHI DIAMOND INDUSTRIAL CO. (LTD. 2-12-12 Minami-Kanede, Suita-city Osaka 44, 56400, JP)
Tomimori, Hiroshi c/o MITSUBOSHI DIAMOND INDUSTRIAL CO. (LTD. 2-12-12 Minami-Kanede, Suita-city Osaka 44, 56400, JP)
International Classes:
B23K26/08; B23K26/36; B23K26/40; B28D1/24; B28D5/00; C03B33/10; H01L21/301
Attorney, Agent or Firm:
Kashima, Yoshio (409 Yuni Higashi-Umeda, 7-2 Minami Ogi-machi, Kita-k, Osaka-city Osaka 52, 53000, JP)
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