Title:
METHOD FOR X-RAY DIFFRACTION, AND DEVICE THEREFOR
Document Type and Number:
WIPO Patent Application WO/2012/015053
Kind Code:
A1
Abstract:
Provided is a small and light weight X-ray diffraction device which does not require a goniometer. Specifically provided is an X-ray diffraction device equipped with: a first X-ray irradiation means for irradiating the surface of a sample with a formed X-ray from a first direction; a second X-ray irradiation means for irradiating the region on the surface of the sample, which was irradiated with the X-ray from the first X-ray irradiation means, with a second formed X-ray from a second direction; an X-ray detection means for detecting a first diffraction X-ray generated from the region on the sample irradiated with the X-ray from the first X-ray irradiation means and a second diffraction X-ray generated from the region on the sample irradiated with the X-ray from the second X-ray irradiation means; and an X-ray diffraction signal processing means for processing the signal obtained by detecting, by means of the X-ray detection means, the first diffraction X-ray and the second diffraction X-ray which were generated from the same region of the sample.
Inventors:
TORAYA Hideo (Matsubara-cho Akishima-sh, Tokyo 66, 〒1968666, JP)
虎谷 秀穂 (〒66 東京都昭島市松原町三丁目９番１２号 株式会社リガク内 Tokyo, 〒1968666, JP)
虎谷 秀穂 (〒66 東京都昭島市松原町三丁目９番１２号 株式会社リガク内 Tokyo, 〒1968666, JP)
Application Number:
JP2011/067551
Publication Date:
February 02, 2012
Filing Date:
July 29, 2011
Export Citation:
Assignee:
RIGAKU CORPORATION (3-9-12, Matsubara-cho Akishima-sh, Tokyo 66, 〒1968666, JP)
株式会社リガク (〒66 東京都昭島市松原町三丁目９番１２号 Tokyo, 〒1968666, JP)
TORAYA Hideo (Matsubara-cho Akishima-sh, Tokyo 66, 〒1968666, JP)
株式会社リガク (〒66 東京都昭島市松原町三丁目９番１２号 Tokyo, 〒1968666, JP)
TORAYA Hideo (Matsubara-cho Akishima-sh, Tokyo 66, 〒1968666, JP)
International Classes:
G01N23/207
Attorney, Agent or Firm:
POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)
Claims: