Title:
METHODS AND APPARATUS FOR MAINTAINING A PRESSURE WITHIN AN ENVIRONMENTALLY CONTROLLED CHAMBER
Document Type and Number:
WIPO Patent Application WO2001096972
Kind Code:
A3
Abstract:
A system including a chamber; (102) a variable speed vacuum pump (204) coupled to the chamber; and a pressure controller (202) coupled to the chamber. The pressure controller (202) compares a set point pressure with a pressure measurement for the chamber and adjusts a flow of gas through the pressure controller based on a difference between the pressure measurement and the set point pressure. The system includes a pressure measurement device coupled (126) to the chamber and to the pressure controller, and a main controller coupled to the variable speed vacuum pump, the pressure controller and the pressure measurement device. The pressure measurement device measures a pressure within the chamber and provides a pressure measurement to the pressure controller and the main controller. The main controller adjusts a speed of the variable speed vacuum pump (204); and provides the set point pressure to the pressure controller.
Inventors:
PFEIFFER KENNETH E (US)
VERDICT GREGORY S (US)
VERDICT GREGORY S (US)
Application Number:
PCT/US2001/018992
Publication Date:
April 11, 2002
Filing Date:
June 13, 2001
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
PFEIFFER KENNETH E (US)
VERDICT GREGORY S (US)
PFEIFFER KENNETH E (US)
VERDICT GREGORY S (US)
International Classes:
B01J3/00; B01J3/02; G05D16/20; H01L21/00; (IPC1-7): G05D16/20
Domestic Patent References:
| WO1985002888A1 | 1985-07-04 |
Foreign References:
| US5944049A | 1999-08-31 | |||
| US5795328A | 1998-08-18 | |||
| EP0843339A2 | 1998-05-20 | |||
| US6041817A | 2000-03-28 | |||
| US6066358A | 2000-05-23 | |||
| US5626679A | 1997-05-06 |
Download PDF: