Title:
METHODS AND APPARATUS TO DETERMINE PARAMETERS IN METAL-CONTAINING FILMS
Document Type and Number:
WIPO Patent Application WO/2012/148906
Kind Code:
A3
Abstract:
A method and apparatus to determine a parameter of a metal-containing film are provided herein. In some embodiments, a method of determining a parameter of a metal-containing film may include generating a first magnetic field by flowing an alternating current through a coil disposed adjacent to and spaced apart from the metal-containing film, wherein the first magnetic field induces a second magnetic field proximate the metal-containing film; heating the metal-containing film from a first temperature to a second temperature; measuring a response of the first magnetic field to the second magnetic field as the metal-containing film is heated from the first temperature to the second temperature; and correlating the response with a rate of temperature change of the metal-containing film as the metal-containing film is heated from the first temperature to the second temperature to determine a parameter of the metal-containing film.
Inventors:
RAVID ABRAHAM (US)
Application Number:
PCT/US2012/034784
Publication Date:
December 27, 2012
Filing Date:
April 24, 2012
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
RAVID ABRAHAM (US)
RAVID ABRAHAM (US)
International Classes:
G01N27/72; G01N25/58
Foreign References:
| US5172055A | 1992-12-15 | |||
| US6975108B2 | 2005-12-13 | |||
| US7616734B1 | 2009-11-10 | |||
| US6064201A | 2000-05-16 |
Attorney, Agent or Firm:
TABOADA, Alan (1030 Broad StreetSuite 20, Shrewsbury New Jersey, US)
Download PDF: