Title:
METHODS AND APPARATUSES FOR ROLL-ON COATING
Document Type and Number:
WIPO Patent Application WO/2012/137063
Kind Code:
A3
Abstract:
Coating rollers accepting liquid media provide liquid chemicals to substrates for depositing a thin coating layer on the flat substrates, such as semiconductors or panels. The liquid delivery system can control the flow and the pressure of the liquid to achieve optimum process condition with minimum excess waste. Rollers with non-uniform distribution of liquid media can provide a non-uniform thickness profile on the substrates, which can be used to compensate for the non-uniformity of subsequent processes. The liquid media is cooled to a life-preserving temperature while shielded from the thermal energy heating the substrates to prevent degrading the liquid media. Physical barrier or temperature barrier can be established in vicinities of die rollers to further limit exposing the liquid media to high temperature.
Inventors:
REBSTOCK LUTZ (DE)
WOLKE KLAUS (DE)
WOLKE KLAUS (DE)
Application Number:
PCT/IB2012/000710
Publication Date:
March 07, 2013
Filing Date:
April 07, 2012
Export Citation:
Assignee:
DYNAMIC MICRO SYSTEMS (DE)
REBSTOCK LUTZ (DE)
WOLKE KLAUS (DE)
REBSTOCK LUTZ (DE)
WOLKE KLAUS (DE)
International Classes:
B05C1/08; B05C1/10; H01L31/048
Foreign References:
| US20030175441A1 | 2003-09-18 | |||
| US3805738A | 1974-04-23 |
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