Title:
METHODS FOR DESIGNING AND PROCESSING MICRO-CANTILEVER PROBE WITH SPECIAL-SHAPED CROSS SECTION APPLIED TO ULTRA-LOW FRICTION COEFFICIENT MEASUREMENT IN NANOSCALE SINGLE POINT CONTACT
Document Type and Number:
WIPO Patent Application WO/2019/084983
Kind Code:
A1
Abstract:
Methods for designing and processing micro-cantilever probe with a special-shaped cross section applied to ultra-low friction coefficient measurement in nanoscale single point contact. The design method comprises: first, establishing a universal theoretical friction coefficient measurement model; and then establishing, according to structural characteristics of a micro-cantilever probe with a special-shaped cross section, a theoretical friction coefficient measurement model applicable to the micro-cantilever probe with a special-shaped cross section; and on this basis, in combination with constraint conditions, such as friction coefficient resolution, loadable maximum positive pressure or measurable minimum friction, and atomic force microscopy characteristics, designing a micro-cantilever probe with a special-shaped cross section that meets measurement requirements. The processed probe can significantly improve the friction coefficient measurement resolution, implement super-low friction coefficient measurement of resolution of 10-6 or higher, and ensure the authenticity and reliability of the quantitative analysis in a superlubricity process, thereby providing an important measurement means for deep and systematic study of the superlubricity theory and technology.
Inventors:
QIAN LINMAO (CN)
JIANG LIANG (CN)
LIN BIN (CN)
LUO JIANBIN (CN)
JIANG LIANG (CN)
LIN BIN (CN)
LUO JIANBIN (CN)
Application Number:
PCT/CN2017/109864
Publication Date:
May 09, 2019
Filing Date:
November 08, 2017
Export Citation:
Assignee:
UNIV SOUTHWEST JIAOTONG (CN)
International Classes:
G01Q20/02
Domestic Patent References:
| WO2016085989A1 | 2016-06-02 |
Foreign References:
| CN106526242A | 2017-03-22 | |||
| CN104071746A | 2014-10-01 | |||
| CN107085127A | 2017-08-22 | |||
| CN104749400A | 2015-07-01 | |||
| JP2000258331A | 2000-09-22 | |||
| JP2011038851A | 2011-02-24 | |||
| US20120047610A1 | 2012-02-23 |
Other References:
BAO, HAIFEI ET AL.: "Lateral Force Calibration of Micro-Cantilever/Tip in Atomic Force Microscopy", JOURNAL OF TEST AND MEASUREMENT TECHNOLOGY, vol. 19, no. 1, 31 December 2005 (2005-12-31), pages 4 - 10
MIAO, BIN ET AL.: "Design and Fabrication of Millimeter Scale Cantilever-type Sensors for Passive Micro Force Calibration", PIEZOELECTRICS & ACOUSTOOPTICS, vol. 38, no. 4, 31 August 2016 (2016-08-31), pages 562 - 565
SHAO, YAQI ET AL.: "In-plane Bending Performance Test of Micro-Cantilever based on Whole-Field Displacement Measuring Technique", JOURNAL OF EXPERIMENTAL MECHANICS, vol. 29, no. 4, 31 August 2014 (2014-08-31), pages 442 - 446
MIAO, BIN ET AL.: "Design and Fabrication of Millimeter Scale Cantilever-type Sensors for Passive Micro Force Calibration", PIEZOELECTRICS & ACOUSTOOPTICS, vol. 38, no. 4, 31 August 2016 (2016-08-31), pages 562 - 565
SHAO, YAQI ET AL.: "In-plane Bending Performance Test of Micro-Cantilever based on Whole-Field Displacement Measuring Technique", JOURNAL OF EXPERIMENTAL MECHANICS, vol. 29, no. 4, 31 August 2014 (2014-08-31), pages 442 - 446
Attorney, Agent or Firm:
CHENGDOU HONGSHUN PATENT AGENCY (CN)
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