Title:
METHODS OF FAULT DETECTION FOR MULTIPLEXED HEATER ARRAY
Document Type and Number:
WIPO Patent Application WO/2012/054198
Kind Code:
A3
Abstract:
Abstract Described herein is a method of detecting fault conditions in a multiplexed multi-heater-zone heating plate for a substrate support assembly used to support a semiconductor substrate in a semiconductor processing apparatus.
Inventors:
SINGH HARMEET (US)
Application Number:
PCT/US2011/053558
Publication Date:
June 21, 2012
Filing Date:
September 28, 2011
Export Citation:
Assignee:
LAM RES CORP (US)
SINGH HARMEET (US)
SINGH HARMEET (US)
International Classes:
H01L21/205; H01L21/66
Foreign References:
| US20070125762A1 | 2007-06-07 | |||
| US6060697A | 2000-05-09 | |||
| US20090183677A1 | 2009-07-23 | |||
| JP2005123286A | 2005-05-12 |
Attorney, Agent or Firm:
SKIFF, Peter K. (P.O. Box 140, Alexandria Virginia, US)
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