Title:
Methods of operating microvalve assemblies and related structures and related device
Document Type and Number:
WIPO Patent Application WO2006012509
Kind Code:
A9
Abstract:
A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.
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Inventors:
TEACH WILLIAM O (US)
GIBSON PAUL W (US)
DOUGLAS KEVIN R (US)
HARRIS DONALD C (US)
GOODWIN SCOTT H (US)
DAUSCH DAVID E (US)
DETTLOFF WAYNE D (US)
GIBSON PAUL W (US)
DOUGLAS KEVIN R (US)
HARRIS DONALD C (US)
GOODWIN SCOTT H (US)
DAUSCH DAVID E (US)
DETTLOFF WAYNE D (US)
Application Number:
PCT/US2005/026029
Publication Date:
June 29, 2006
Filing Date:
July 22, 2005
Export Citation:
Assignee:
AFA CONTROLS LLC (US)
International Classes:
F16J3/00
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