Title:
METHODS AND REACTORS FOR FORMING SUPERCONDUCTOR LAYERS
Document Type and Number:
WIPO Patent Application WO2003067672
Kind Code:
A3
Abstract:
Methods for forming superconductor layers are disclosed, which comprise heating a film containing barium fluoride on a substrate and impinging a reactant on the film to convert it into a superconductor material. Also reactors and systems for carrying out the provided methods are disclosed.
Inventors:
FRTITZEMEIER LESLIE G
VEREBELYI DARREN P
RUPICH MARTIN W
ZHENG WEI
LI QI
LI XIAOPING
VEREBELYI DARREN P
RUPICH MARTIN W
ZHENG WEI
LI QI
LI XIAOPING
Application Number:
PCT/US2002/024101
Publication Date:
March 18, 2004
Filing Date:
July 30, 2002
Export Citation:
Assignee:
AMERICAN SUPERCONDUCTOR CORP (US)
International Classes:
C01G1/00; C04B35/45; C01G3/00; C23C8/02; C30B7/00; C30B29/22; H01B12/06; H01B13/00; H01L39/24; (IPC1-7): H01L39/24; C23C18/12
Other References:
AZOULAY J: "Low-temperature solid-state reaction of in situ growth of YBa/sub 2/Cu/sub 3/O/sub 7- delta / thin films by resistive evaporation", JOURNAL OF APPLIED PHYSICS, 1 DEC. 1992, USA, vol. 72, no. 11, pages 5341 - 5343, XP002252962, ISSN: 0021-8979
WANG X K ET AL: "ORIENTED THIN FILMS OF YBACU(F)O WITH HIGH TC AND JC PREPARED BY ELECTRON BEAM MULTILAYER EVAPORATION", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 54, no. 16, 17 April 1989 (1989-04-17), pages 1573 - 1575, XP000034631, ISSN: 0003-6951
MANKIEWICH P M ET AL: "High critical-current density Ba/sub 2/YCu/sub 3/O/sub 7/ thin films produced by coevaporation of Y, Cu, and BaF/sub 2/", HIGH-TEMPERATURE SUPERCONDUCTORS SYMPOSIUM, BOSTON, MA, USA, 30 NOV.-4 DEC. 1987, 1988, Pittsburgh, PA, USA, Mater. Res. Soc, USA, pages 119 - 125, XP009016335, ISBN: 0-931837-67-7
WANG X K ET AL: "ORIENTED THIN FILMS OF YBACU(F)O WITH HIGH TC AND JC PREPARED BY ELECTRON BEAM MULTILAYER EVAPORATION", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 54, no. 16, 17 April 1989 (1989-04-17), pages 1573 - 1575, XP000034631, ISSN: 0003-6951
MANKIEWICH P M ET AL: "High critical-current density Ba/sub 2/YCu/sub 3/O/sub 7/ thin films produced by coevaporation of Y, Cu, and BaF/sub 2/", HIGH-TEMPERATURE SUPERCONDUCTORS SYMPOSIUM, BOSTON, MA, USA, 30 NOV.-4 DEC. 1987, 1988, Pittsburgh, PA, USA, Mater. Res. Soc, USA, pages 119 - 125, XP009016335, ISBN: 0-931837-67-7
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