Title:
METHODS AND SYSTEMS FOR DECELARATING PROOF MASS MOVEMENTS WITHIN MEMS STRUCTURES
Document Type and Number:
WIPO Patent Application WO2004059250
Kind Code:
A3
Abstract:
A micro-electromechanical systems (MEMS) device (10) is described which includes a substrate (110) having at least one anchor, a proof mass (12) having either of at least one deceleration extension (66) extending from the proof mass or at least one deceleration indentation (158) formed in the proof mass, a motor drive comb (18), and a motor sense comb (20). The MEMS device further includes a plurality of suspensions (14) suspending the proof mass over the substrate and between the motor drive comb and the motor sense comb, and the suspensions are anchored to the substrate. The MEMS device also includes a body (60) attached to the substrate and at least one deceleration beam (64) extending from the body. The deceleration extensions engage either deceleration beams or deceleration indentations and slow or stop the proof mass before it contacts either of the motor drive comb or the motor sense comb.
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Inventors:
GLENN MAX C
PLATT WILLIAM P
WEBER MARK W
PLATT WILLIAM P
WEBER MARK W
Application Number:
PCT/US2003/040317
Publication Date:
August 19, 2004
Filing Date:
December 15, 2003
Export Citation:
Assignee:
HONEYWELL INT INC (US)
International Classes:
B81B7/00; G01C19/5719; (IPC1-7): G01C19/56; G01P15/00
Foreign References:
| US5721377A | 1998-02-24 | |||
| US6214243B1 | 2001-04-10 | |||
| US4882933A | 1989-11-28 | |||
| US5111693A | 1992-05-12 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 013, no. 430 (P - 937) 26 September 1989 (1989-09-26)
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