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Title:
METHODS FOR TEXTURING A CHAMBER COMPONENT AND CHAMBER COMPONENTS HAVING A TEXTURED SURFACE
Document Type and Number:
WIPO Patent Application WO/2016/095086
Kind Code:
A1
Abstract:
A method for a textured surface on a chamber component is provided and includes providing a chamber component, applying a Iayer of a photoresist to a surface of the chamber component, exposing a portion of the photoresist to optical energy using a m ask to cure a portion of the photoresist, removing uncured photoresist from the surface, and electrochemically etching the chamber component to form a textured surface on the chamber component.

Inventors:
HUANG XI (CN)
XU WENLONG (CN)
Application Number:
PCT/CN2014/093844
Publication Date:
June 23, 2016
Filing Date:
December 15, 2014
Export Citation:
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Assignee:
APPLIED MATERIALS INC (US)
HUANG XI (CN)
XU WENLONG (CN)
International Classes:
H01L21/02
Foreign References:
US20120258280A12012-10-11
US20050284372A12005-12-29
US20030173526A12003-09-18
US20140349485A12014-11-27
CN1179621A1998-04-22
US20060110620A12006-05-25
Attorney, Agent or Firm:
LECOME INTELLECTUAL PROPERTY AGENT LTD (CN)
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