Title:
METROLOGY RECIPE GENERATION USING PREDICTED METROLOGY IMAGES
Document Type and Number:
WIPO Patent Application WO/2018/118663
Kind Code:
A3
Abstract:
A metrology system includes a controller communicatively coupled to a metrology tool. The controller may generate a three-dimensional model of a sample, generate a predicted metrology image corresponding to a predicted analysis of the sample with the metrology tool based on the three-dimensional model, evaluate two or more candidate metrology recipes for extracting the metrology measurement from the one or more predicted metrology images, select, based on one or more selection metrics, a metrology recipe from the two or more candidate metrology recipes for extracting a metrology measurement from an image of the structure from the metrology tool, receive an output metrology image of a fabricated structure from the metrology tool based on a metrology measurement of the fabricated structure, and extract the metrology measurement associated with the fabricated structure from the output metrology image based on the metrology recipe.
Inventors:
SMITH MARK D (US)
FANG CHAO (US)
DUFFY BRIAN (US)
FANG CHAO (US)
DUFFY BRIAN (US)
Application Number:
PCT/US2017/066517
Publication Date:
August 02, 2018
Filing Date:
December 14, 2017
Export Citation:
Assignee:
KLA TENCOR CORP (US)
International Classes:
H01L21/66
Foreign References:
| US20160290796A1 | 2016-10-06 | |||
| US9151712B1 | 2015-10-06 | |||
| US20080250384A1 | 2008-10-09 | |||
| US20160025650A1 | 2016-01-28 | |||
| US20150006103A1 | 2015-01-01 |
Other References:
See also references of EP 3549158A4
Attorney, Agent or Firm:
MCANDREWS, Kevin et al. (US)
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