Title:
MICHELSON INTERFEROMETER AND FOURIER TRANSFORM INFRARED SPECTROMETER COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2020/174665
Kind Code:
A1
Abstract:
This Michelson interferometer comprises a fixed mirror, a movable mirror, a movement mechanism, and a beam splitter. The movable mirror is provided so as to be capable of moving in one direction and the opposite direction from the one direction. The movement mechanism moves the movable mirror in the one direction and the opposite direction. The Michelson interferometer additionally comprises an inclination detection unit and determination unit. The inclination detection unit detects the inclination of the movable mirror when the movable mirror is moving. The determination unit determines the deterioration of the movement mechanism on the basis of change in the detected inclination.
Inventors:
WAKUDA SHINYA (JP)
Application Number:
PCT/JP2019/007856
Publication Date:
September 03, 2020
Filing Date:
February 28, 2019
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
G01B9/02; G01J3/45
Domestic Patent References:
| WO2012073681A1 | 2012-06-07 | |||
| WO2014132379A1 | 2014-09-04 | |||
| WO2012064655A1 | 2012-05-18 |
Foreign References:
| JP2016142527A | 2016-08-08 | |||
| JPS6459019A | 1989-03-06 | |||
| JP2012042257A | 2012-03-01 | |||
| JPS63168522A | 1988-07-12 |
Attorney, Agent or Firm:
FUKUSHIMA, Yoshito (JP)
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