MICRO-ACTUATOR DEVICE AND OPTICAL SWITCH SYSTEM USING THE SAME

WIPO Patent Application WO/2004/033363

A1

A movable plate (21) is fixed to a substrate (11) via flexure portions (27a, 27b) and can move up/down with respect to the substrate (11). The substrate (11) also serves as a fixed electrode. The movable plate (21) includes: second electrode portions (23a, 23b) capable of generating electrostatic force between the movable plate (21) and the substrate (11) by voltage between the movable plate (21) and the substrate (11), and a current flow path (25) arranged in the magnetic field and generating Lorentz’s force by electrical connection. A mirror (12) is arranged on the movable plate (21) so as to proceed and retreat into/from the optical path. A control section controls the current in such a manner that when the movable plate (21) is moved from the lower side position, where the electrostatic force increases, to the upper side position, the Lorentz’s force is generated downward and gradually reduced while the movable plate (21) is moved from the intermediate position to the upper side position.

AKAGAWA KEIICHI (JP)
SUZUKI YOSHIHIKO (JP)
KURUMADA KATSUHIKO (JP)
TAMAMURA TOSHIAKI (JP)
KANAYA MASATOSHI (JP)

PCT/JP2003/012888

April 22, 2004

October 08, 2003

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NIKON CORP (JP)
NTT ELECTRONICS CORP (JP)
AKAGAWA KEIICHI (JP)
SUZUKI YOSHIHIKO (JP)
KURUMADA KATSUHIKO (JP)
TAMAMURA TOSHIAKI (JP)
KANAYA MASATOSHI (JP)

B81B3/00; B81B7/04; G01P15/125; G02B6/26; G02B6/35; G02B6/42; G02B26/08; G02F1/09; H02K33/18; H02K41/035; (IPC1-7): B81B3/00; B81B7/04; G02B26/08

JP2002131685A	2002-05-09
JP2002287075A	2002-10-03
JP2001264676A	2001-09-26
JPH11231233A	1999-08-27

Hosoe, Toshiaki (3-6 Nishikanagawa 1-Chome, Kanagawa-k, Yokohama-Shi Kanagawa, JP)

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