Title:
MICRO CALORIMETER DEVICE WITH IMPROVED ACCURACY
Document Type and Number:
WIPO Patent Application WO/2010/140719
Kind Code:
A1
Abstract:
The present invention relates to a micro calorimeter device with improved accuracy having a new design based on a silicon nitride thin film platform implemented with a Nano Electro Mechanical System (NEMS) processing technology. More specifically, the present invention relates to a silicon nitride thin film type micro calorimeter device for an apparatus which measures the specific heat of nano substances, and to a micro calorimeter device with improved accuracy which measures the specific heat of nano substances at temperatures between 20K to 800K. For this purpose, the present invention comprises: a first silicon nitride thin film (12a,12b) on the upper side of a silicon frame (11a,11b) having both sides polished; a second silicon nitride thin film (13) on the lower side of the silicon frame; a heater/sensor (14a, 14b) connected to a power extension cable on the lower side of the second silicon nitride thin film (13); and an isothermal layer (15) on the upper side of the second silicon nitride thin film, thereby improving the accuracy of the micro calorimeter device.
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Inventors:
KIM, Kee Hoon (Kyungdong Merville 106-102 ho, Bohn-dong Dongjak-gu, Seoul 156-060, 156-060, KR)
김기훈 (서울특별시 동작구 본동 경동 메르빌 106-102호, 156-060 Seoul, 156-060, KR)
PARK, Yun Daniel (1403ho, Seocho LG Eclat 1599-2,Seocho3-dong, Seocho-gu, Seoul 137-727, 137-727, KR)
박윤 (서울특별시 서초구 서초3동 1599-2 서초 LG에클라트 1403호, 137-727 Seoul, 137-727, KR)
KIM, Hyung Joon (105 dong 1302 ho, Hynix Dormitory Godam-don, Icheon Kyungki-do 467-140, 467-140, KR)
김기훈 (서울특별시 동작구 본동 경동 메르빌 106-102호, 156-060 Seoul, 156-060, KR)
PARK, Yun Daniel (1403ho, Seocho LG Eclat 1599-2,Seocho3-dong, Seocho-gu, Seoul 137-727, 137-727, KR)
박윤 (서울특별시 서초구 서초3동 1599-2 서초 LG에클라트 1403호, 137-727 Seoul, 137-727, KR)
KIM, Hyung Joon (105 dong 1302 ho, Hynix Dormitory Godam-don, Icheon Kyungki-do 467-140, 467-140, KR)
Application Number:
KR2009/002941
Publication Date:
December 09, 2010
Filing Date:
June 02, 2009
Export Citation:
Assignee:
SNU R&DB FOUNDATION (San56-1, Shinlim-dong Gwanak-gu, Seoul 151-742, 151-742, KR)
서울대학교산학협력단 (서울특별시 관악구 신림동 산 56-1, 151-742 Seoul, 151-742, KR)
KIM, Kee Hoon (Kyungdong Merville 106-102 ho, Bohn-dong Dongjak-gu, Seoul 156-060, 156-060, KR)
김기훈 (서울특별시 동작구 본동 경동 메르빌 106-102호, 156-060 Seoul, 156-060, KR)
PARK, Yun Daniel (1403ho, Seocho LG Eclat 1599-2,Seocho3-dong, Seocho-gu, Seoul 137-727, 137-727, KR)
박윤 (서울특별시 서초구 서초3동 1599-2 서초 LG에클라트 1403호, 137-727 Seoul, 137-727, KR)
서울대학교산학협력단 (서울특별시 관악구 신림동 산 56-1, 151-742 Seoul, 151-742, KR)
KIM, Kee Hoon (Kyungdong Merville 106-102 ho, Bohn-dong Dongjak-gu, Seoul 156-060, 156-060, KR)
김기훈 (서울특별시 동작구 본동 경동 메르빌 106-102호, 156-060 Seoul, 156-060, KR)
PARK, Yun Daniel (1403ho, Seocho LG Eclat 1599-2,Seocho3-dong, Seocho-gu, Seoul 137-727, 137-727, KR)
박윤 (서울특별시 서초구 서초3동 1599-2 서초 LG에클라트 1403호, 137-727 Seoul, 137-727, KR)
International Classes:
G01N25/20; B81B7/02; G01K17/08
Attorney, Agent or Firm:
PARK, Jin Ho (Room#504, SK Hub Blue 708-26,Yeoksam2-dong, Gangnam-gu, Seoul 135-919, 135-919, KR)
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