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Title:
MICRO CALORIMETER DEVICE WITH IMPROVED ACCURACY
Document Type and Number:
WIPO Patent Application WO/2010/140719
Kind Code:
A1
Abstract:
The present invention relates to a micro calorimeter device with improved accuracy having a new design based on a silicon nitride thin film platform implemented with a Nano Electro Mechanical System (NEMS) processing technology. More specifically, the present invention relates to a silicon nitride thin film type micro calorimeter device for an apparatus which measures the specific heat of nano substances, and to a micro calorimeter device with improved accuracy which measures the specific heat of nano substances at temperatures between 20K to 800K. For this purpose, the present invention comprises: a first silicon nitride thin film (12a,12b) on the upper side of a silicon frame (11a,11b) having both sides polished; a second silicon nitride thin film (13) on the lower side of the silicon frame; a heater/sensor (14a, 14b) connected to a power extension cable on the lower side of the second silicon nitride thin film (13); and an isothermal layer (15) on the upper side of the second silicon nitride thin film, thereby improving the accuracy of the micro calorimeter device.

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Inventors:
KIM KEE HOON (KR)
PARK YUN DANIEL (KR)
KIM HYUNG JOON (KR)
KIM JAE WOOK (KR)
SUH KI SUNG (KR)
Application Number:
PCT/KR2009/002941
Publication Date:
December 09, 2010
Filing Date:
June 02, 2009
Export Citation:
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Assignee:
SNU R&DB FOUNDATION (KR)
KIM KEE HOON (KR)
PARK YUN DANIEL (KR)
KIM HYUNG JOON (KR)
KIM JAE WOOK (KR)
SUH KI SUNG (KR)
International Classes:
G01N25/20; B81B7/02; G01K17/08
Foreign References:
US20050254547A12005-11-17
US5634718A1997-06-03
US20070286254A12007-12-13
US6079873A2000-06-27
Attorney, Agent or Firm:
PARK, JIN HO (KR)
박진호 (KR)
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