MICRO COIL, AND MANUFACTURING METHOD AND MANUFACTURING DEVICE THEREFOR

Title:

MICRO COIL, AND MANUFACTURING METHOD AND MANUFACTURING DEVICE THEREFOR

Document Type and Number:

WIPO Patent Application WO/2012/032943

Kind Code:

A1

Abstract:

[Problem] To provide a micro coil which is manufactured in such a manner that the flow and contact with a catalyst of source gas in a reaction container are satisfactorily performed by devising the configurations of the introduction of the source gas into the reaction container and the discharge of the gas from the reaction container, and a manufacturing method and a manufacturing device therefor. [Solution] A reaction container (20) is provided with a cylindrical container body (20a), source gas introduction cylinder groups (20b-20d) and a gas discharge cylinder group (20f) which are extended in mutually opposite directions from the left and right sides of the container body (20a), and a cylindrical substrate (30) which is inserted into the container body (20a). Source gas introduced into the container body (20a) from the source gas introduction cylinder groups (20b-20d) is thermally decomposed by reacting with a catalyst supported by the substrate (30) under a predetermined high temperature and causes a micro coil to grow from the substrate (30).

Inventors:

MOTOJIMA SEIJI (JP)

Application Number:

PCT/JP2011/069151

Publication Date:

March 15, 2012

Filing Date:

August 25, 2011

Export Citation:

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Assignee:

CMC ADVANCED R & D CO LTD (JP)
MOTOJIMA SEIJI (JP)

International Classes:

C01B31/02; B01J23/755; D01F9/127

Foreign References:

JP2003213530A	2003-07-30
JP2002201532A	2002-07-19
JP2004261630A	2004-09-24
JP2007045637A	2007-02-22
JPH1181051A	1999-03-26

Other References: