Title:
MICRO DEVICE TRANSFERRING METHOD, AND MICRO DEVICE SUBSTRATE MANUFACTURED BY MICRO DEVICE TRANSFERRING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/038481
Kind Code:
A1
Abstract:
The present invention relates to a method for transferring a micro device, comprising: a pressurization step; a first adhesive force forming step; a second adhesive force forming step; and a releasing step. The pressurization step enables a carrier film, in which the micro device is attached to an adhesive layer, and a substrate, on which a solder is applied onto a metal electrode, to contact each other and pressurize the same. In the first adhesive force forming step, a first adhesive force between the micro device and the solder is formed as the solder disposed between the micro device and the metal electrode is pressed by the pressurization step. In the second adhesive force forming step, a second adhesive force between the micro device and the adhesive layer is formed as the micro device is press-fitted into and bonded to the adhesive layer by the pressurization step. The releasing step releases the carrier film from the substrate, with the micro device adhered to the solder. The strength of the second adhesive force is proportional to a press-fitting depth at which the micro device is press-fitted into the adhesive layer, and the press-fitting depth of the micro device with respect to the adhesive layer is formed within a range in which the second adhesive force is formed to be smaller than the first adhesive force.
Inventors:
HWANGBO YUN (KR)
CHOI BYUNG IK (KR)
KIM JAE HYUN (KR)
JEONG YEON WOO (KR)
HONG SEONG MIN (KR)
JANG BONG KYUN (KR)
KIM KWANG SEOP (KR)
KIM KYUNG SIK (KR)
LEE HAK JOO (KR)
CHOI BYUNG IK (KR)
KIM JAE HYUN (KR)
JEONG YEON WOO (KR)
HONG SEONG MIN (KR)
JANG BONG KYUN (KR)
KIM KWANG SEOP (KR)
KIM KYUNG SIK (KR)
LEE HAK JOO (KR)
Application Number:
PCT/KR2017/009082
Publication Date:
March 01, 2018
Filing Date:
August 21, 2017
Export Citation:
Assignee:
CT ADVANCED META MAT (KR)
International Classes:
H01L21/768; H01L21/18; H01L21/52; H01L21/60; H01L21/677
Foreign References:
| KR20110118616A | 2011-10-31 | |||
| KR20090132931A | 2009-12-31 | |||
| KR20130116648A | 2013-10-24 | |||
| JP4891895B2 | 2012-03-07 | |||
| US20130285086A1 | 2013-10-31 |
Attorney, Agent or Firm:
KIM, Taewan (KR)
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