Title:
MICRO ELECTRO MECHANICAL SYSTEMS DEVICE AND APPARATUS FOR COMPENSATING TREMBLE
Document Type and Number:
WIPO Patent Application WO/2013/094875
Kind Code:
A1
Abstract:
Disclosed are a micro electro mechanical systems (MEMS) device and an apparatus for compensating for a tremble. The MEMS device includes a substrate; a driven member moving relative to the substrate; an elastic member connected to the driven member and the substrate; a driving member fixed to the substrate for driving the driven member; and a dynamic stopper fixed to the substrate and latched to the driven member.
Inventors:
PARK HYUN KYU (KR)
MOON SEUNG HWAN (KR)
LEE JONG HYUN (KR)
MOON SEUNG HWAN (KR)
LEE JONG HYUN (KR)
Application Number:
PCT/KR2012/009318
Publication Date:
June 27, 2013
Filing Date:
November 07, 2012
Export Citation:
Assignee:
LG INNOTEK CO LTD (KR)
KWANGJU INST SCI & TECH (KR)
KWANGJU INST SCI & TECH (KR)
International Classes:
B81B3/00; G02B7/04; G02B27/64; G03B5/00
Foreign References:
| KR20110113977A | 2011-10-19 | |||
| JP2008242207A | 2008-10-09 | |||
| US20050016605A1 | 2005-01-27 | |||
| US6801682B2 | 2004-10-05 | |||
| US7170665B2 | 2007-01-30 |
Attorney, Agent or Firm:
SEO, Kyo Jun (832-41Yeoksam-dong,,Gangnam-gu, Seoul 135-080, KR)
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