Title:
MICRO-ELECTROMECHANICAL DEVICE AND MODULE AND METHOD OF MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO2004114345
Kind Code:
A3
Abstract:
The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the switchable capacitor constituted by the first and third electrode is provided between the signal path and ground. The MEMS element of the invention is very suitable for integration in a network of passive components.
Inventors:
VAN BEEK JOZEF T M (NL)
STEENEKEN PETER G (NL)
STEENEKEN PETER G (NL)
Application Number:
PCT/IB2004/050974
Publication Date:
March 31, 2005
Filing Date:
June 23, 2004
Export Citation:
Assignee:
KONINKL PHILIPS ELECTRONICS NV (NL)
VAN BEEK JOZEF T M (NL)
STEENEKEN PETER G (NL)
VAN BEEK JOZEF T M (NL)
STEENEKEN PETER G (NL)
International Classes:
H01H59/00; (IPC1-7): H01H59/00
Domestic Patent References:
| WO2000052722A1 | 2000-09-08 |
Foreign References:
| US6373007B1 | 2002-04-16 | |||
| US20020153236A1 | 2002-10-24 |
Other References:
SHIKIDA M ET AL: "FABRICATION OF AN S-SHAPED MICROACTUATOR", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE INC. NEW YORK, US, vol. 6, no. 1, 1 March 1997 (1997-03-01), pages 18 - 24, XP000691434, ISSN: 1057-7157
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