Title:
A MICRO-ELECTROMECHANICAL VARIABLE CAPACTITOR
Document Type and Number:
WIPO Patent Application WO2004000717
Kind Code:
A3
Abstract:
A micro-electromechanical variable capacitor with first and second capacitor plates spaced apart to define a gap therebetween. The first plate has two control electrodes and an active electrode. The second plate is movable relative to first plate when a voltage is applied to produce a potential difference across the control electrode and the second capacitor plate. This has the effect of varying the capacitance of the capacitor. The facing surface of at least one of the plates is formed in such a way that it has a roughened surface. The degree of roughness is sufficient to prevent the facing surfaces adhering together through stiction.
Inventors:
GALLANT ANDREW JAMES (GB)
Application Number:
PCT/GB2003/002495
Publication Date:
October 28, 2004
Filing Date:
June 09, 2003
Export Citation:
Assignee:
FILTRONIC COMPOUND SEMICONDUCT (GB)
GALLANT ANDREW JAMES (GB)
GALLANT ANDREW JAMES (GB)
International Classes:
B81B3/00; H01G5/16; (IPC1-7): B81B3/00; H01G5/16
Domestic Patent References:
| WO1998021734A1 | 1998-05-22 | |||
| WO2001045120A2 | 2001-06-21 | |||
| WO2001061848A1 | 2001-08-23 | |||
| WO2002043089A2 | 2002-05-30 |
Other References:
YAO S J ET AL: "MICROMACHINED LOW-LOSS MICROWAVE SWITCHES", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE INC. NEW YORK, US, vol. 8, no. 2, June 1999 (1999-06-01), pages 129 - 134, XP000912713, ISSN: 1057-7157
PATENT ABSTRACTS OF JAPAN vol. 1996, no. 12 26 December 1996 (1996-12-26)
PATENT ABSTRACTS OF JAPAN vol. 1996, no. 12 26 December 1996 (1996-12-26)
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