MICRO-ELEMENT TRANSFER DEVICE AND MICRO-ELEMENT TRANSFER METHOD

WIPO Patent Application WO/2019/190031

A1

Disclosed are a micro-element transfer device and a micro-element transfer method. A micro-element transfer device according to one embodiment of the present invention comprises: a first suction part on which a transfer film having a micro-element attached thereto is suctioned; a second suction part on which a target substrate is stably placed and on which the transfer film provided from the first suction part is suctioned; a carriage part for carrying the second suction part in a first horizontal direction; a pressing part for pressing the transfer film of the second suction part being carried, so as to transfer the micro-element to the target substrate; and a guide part which is arranged at the front end of the pressing part on a carriage path in the first horizontal direction, and guides the transfer film passing through the pressing part to move away from the target substrate and thus separates the transfer film from the micro-element.

HWANGBO YUN (KR)
KIM JAE-HYUN (KR)
YOON SUNG UK (KR)
KIM KYUNG-SIK (KR)
KIM CHANG-HYUN (KR)
CHOI BYUNG-IK (KR)
KIM JUNG YUP (KR)
JANG BONGKYUN (KR)
KIM KWANGSEOP (KR)
LEE HAK JOO (KR)

PCT/KR2018/016991

October 03, 2019

December 31, 2018

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KOREA INST MACH & MATERIALS (KR)
CT ADVANCED META MAT (KR)

H01L21/67; H01L21/52; H01L21/66; H01L25/075

KR101800367B1	2017-11-28
JP2005064236A	2005-03-10
KR20160080265A	2016-07-07
JP2010245287A	2010-10-28
KR20090053127A	2009-05-27

PANKOREA PATENT AND LAW FIRM (KR)

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