Title:
MICRO-FABRICATED ELECTROKINETIC PUMP AND METHOD OF MAKING THE PUMP
Document Type and Number:
WIPO Patent Application WO2004027262
Kind Code:
A3
Abstract:
An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.
Inventors:
CORBIN DAVID
KENNETH GOODSON E
KENNY THOMAS WILLIAM JR
ZENG SHULIN
SANTIAGO JUAN G
KENNETH GOODSON E
KENNY THOMAS WILLIAM JR
ZENG SHULIN
SANTIAGO JUAN G
Application Number:
PCT/US2003/030179
Publication Date:
May 19, 2005
Filing Date:
September 23, 2003
Export Citation:
Assignee:
COOLIGY INC (US)
International Classes:
F04B17/00; F04B19/00; F04F99/00; (IPC1-7): F04B23/00
Foreign References:
| US3267859A | 1966-08-23 | |||
| US3554669A | 1971-01-12 | |||
| US5632876A | 1997-05-27 | |||
| US6012902A | 2000-01-11 |
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