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Patent Searching and Data


Title:
MICRO-FLUIDIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/110714
Kind Code:
A1
Abstract:
A micro-fluidic device (10). The device (10) includes a semiconductor substrate (12) attached to a fluid supply source (18). The substrate (12) contains at least one vaporization heater (14), one or more bubble pumps (16) for feeding fluid from the fluid supply source (18) to the at least one vaporization heater (14), a fluid supply inlet from the fluid supply source (18) in fluid flow communication with each of the one or more bubble pumps (16), and a vapor outlet in vapor flow communication with the at least one vaporization heater (14). The one or more bubble pumps (16) each have a fluid flow path selected from a linear path, a spiral path, a circuitous path, and a combination thereof from the supply inlet to the at least one vaporization heater (14).

Inventors:
BARKLEY LUCAS D (JP)
Application Number:
PCT/JP2016/087717
Publication Date:
June 29, 2017
Filing Date:
December 19, 2016
Export Citation:
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Assignee:
FUNAI ELECTRIC CO (JP)
International Classes:
F04B43/04
Foreign References:
US5705018A1998-01-06
JP2013533101A2013-08-22
US20120007921A12012-01-12
US20010055242A12001-12-27
EP1618803A12006-01-25
US20130202278A12013-08-08
Other References:
See also references of EP 3394444A4
Attorney, Agent or Firm:
KOMATA, Junichi et al. (JP)
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