Title:
MICRO GAS SENSOR ARRAY
Document Type and Number:
WIPO Patent Application WO/2011/115321
Kind Code:
A1
Abstract:
Disclosed is a micro gas sensor array. A micro gas sensor array according to one embodiment comprises: a first micro heater array group formed on a first membrane on the upper surface of a substrate; a second micro heater array group adjacent to the first micro heater array group; a second membrane for thermally separating the first micro heater array group from the second micro heater array group; and a sensing electrode formed on the upper portion of a micro heater array group. According to the embodiment, the size and driving power of a gas sensor array device can be reduced, and thermal stability, reliability, and structural stability can be improved.
Inventors:
PARK KWANG BUM (KR)
KIM SEONG DONG (KR)
PARK JOON SHIK (KR)
KIM SEONG DONG (KR)
PARK JOON SHIK (KR)
Application Number:
PCT/KR2010/001928
Publication Date:
September 22, 2011
Filing Date:
March 30, 2010
Export Citation:
Assignee:
KOREA ELECTRONICS TECHNOLOGY (KR)
PARK KWANG BUM (KR)
KIM SEONG DONG (KR)
PARK JOON SHIK (KR)
PARK KWANG BUM (KR)
KIM SEONG DONG (KR)
PARK JOON SHIK (KR)
International Classes:
G01N27/12; G01N27/02; H01L21/28
Foreign References:
| KR100843169B1 | 2008-07-02 | |||
| KR20050076101A | 2005-07-26 | |||
| KR20060109539A | 2006-10-23 | |||
| JP2007132762A | 2007-05-31 | |||
| JP2006047276A | 2006-02-16 |
Attorney, Agent or Firm:
NAM, Choong Woo et al. (KR)
남충우 (KR)
남충우 (KR)
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Claims: