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Title:
MICRO GAS SENSOR AND MICRO GAS SENSOR MODULE
Document Type and Number:
WIPO Patent Application WO/2018/043792
Kind Code:
A1
Abstract:
A micro gas sensor and a micro gas sensor module are disclosed. The disclosed micro gas sensor comprises a substrate, a first membrane, a second membrane, a heater electrode pattern, a temperature sensor pattern, an insulating film, a sensing electrode pattern, and a sensing film. Therefore, according to the present invention, the micro gas sensor can be configured to maintain the optimal sensitivity.

Inventors:
PARK JOON SHIK (KR)
PARK KWANG BUM (KR)
Application Number:
PCT/KR2016/011317
Publication Date:
March 08, 2018
Filing Date:
October 10, 2016
Export Citation:
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Assignee:
KOREA ELECTRONICS TECHNOLOGY (KR)
International Classes:
G01N27/12; G01N25/32; G01N27/18
Foreign References:
KR20150010473A2015-01-28
KR20110105409A2011-09-27
KR20160063092A2016-06-03
KR20140118022A2014-10-08
JP2010133926A2010-06-17
Attorney, Agent or Firm:
JIN, Cheon Woong et al. (KR)
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