MICRO PHOTOLUMINESCENCE IMAGING WITH OPTICAL FILTERING

Title:

MICRO PHOTOLUMINESCENCE IMAGING WITH OPTICAL FILTERING

Document Type and Number:

WIPO Patent Application WO/2017/142569

Kind Code:

A3

Abstract:

A method that includes: illuminating a wafer with excitation light having a wavelength and intensity sufficient to induce photoluminescence in the wafer; filtering photoluminescence emitted from a portion of the wafer in response to the illumination; directing the filtered photoluminescence onto a detector to image the portion of the wafer on the detector with a spatial resolution of 1 m x 1 m or smaller; and identifying one or more crystallographic defects in the wafer based on the detected filtered photoluminescence.

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Inventors:

KISS ZOLTAN TAMAS (HU)
DUDAS LASZLO (HU)
KOVACS ZSOLT (HU)
LAJTOS IMRE (HU)
NADUDVARI GYORGY (HU)
LAURENT NICOLAS (SG)
JASTRZEBSKI LUBOMIR L (US)

Application Number:

PCT/US2016/029821

Publication Date:

February 15, 2018

Filing Date:

April 28, 2016

Export Citation:

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Assignee:

SEMILAB SDI LLC (US)

International Classes:

G01N21/64; G01N21/95; G06T7/00; H04N5/367; H04N5/374

Foreign References:

KR20150043346A	2015-04-22
US20110292376A1	2011-12-01
US20070008518A1	2007-01-11
US20120111396A1	2012-05-10
US20130129189A1	2013-05-23

Other References: