Title:
MICRO PLASMA JET GENERATOR
Document Type and Number:
WIPO Patent Application WO/2005/091687
Kind Code:
A1
Abstract:
A micro plasma jet generator in which a stabilized micro plasma jet can be generated well with a low power in a micro space under atmospheric pressure. The micro plasma jet generator being driven by a high frequency power supply in VHF band for generating a micro inductively-coupled plasma jet comprises a substrate, a micro antenna arranged on the substrate, and a discharge tube disposed in the vicinity of the micro antenna wherein the micro antenna has a flat meandering shape with a plurality of turns.
Inventors:
Ichiki, Takanori (343-5-302, Kamihiroya Tsurugashima-shi, Saitama03, 35022, JP)
Application Number:
PCT/JP2004/010388
Publication Date:
September 29, 2005
Filing Date:
July 22, 2004
Export Citation:
Assignee:
JAPAN SCIENCE AND TECHNOLOGY AGENCY (1-8 Honcho 4-chome, Kawaguchi-shi, Saitama 12, 33200, JP)
Ichiki, Takanori (343-5-302, Kamihiroya Tsurugashima-shi, Saitama03, 35022, JP)
Ichiki, Takanori (343-5-302, Kamihiroya Tsurugashima-shi, Saitama03, 35022, JP)
International Classes:
G01N27/447; B08B7/00; C23C16/513; G01N37/00; H01L21/304; H01L21/3065; H05H1/24; H05H1/46; H05K3/08; G01N27/447; B08B7/00; C23C16/50; G01N37/00; H01L21/02; H05H1/24; H05H1/46; H05K3/02; (IPC1-7): H05H1/24; C23C16/513; G01N37/00; H01L21/304; H01L21/3065; H05H1/46; H05K3/08
Attorney, Agent or Firm:
Honda, Ichiro (No.201, Kanda Chuo Building 2F 5-7, Nishikanda 2-chom, Chiyoda-ku Tokyo 65, 10100, JP)
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