Title:
MICRO SUCTION STRUCTURE AND METHOD OF FORMING THE SAME
Document Type and Number:
WIPO Patent Application WO/2007/043236
Kind Code:
A1
Abstract:
To provide a simple micro suction structure which is capable of transporting
fluid without relying on the physical properties of a fluid in use and without
a special external drive device such as an external pump, and which is singly usable
and installable in an assembly; and a method of forming the micro suction structure.
Internal spaces partitioned by a separating layer are formed on the upper side
of a vacuum space depressurized to less than the atmospheric pressure and a covering
layer is provided to cover the internal space. Cross-linking portions for transmitting
an external force to the separating layer to destruct a part of the separating
layer are formed in the internal space. Furthermore, a flow passage space communicating
with the internal space and an external space is formed.
Inventors:
HINOODA SHIN-ICHI (JP)
OGINO KAZUYA (JP)
OGINO KAZUYA (JP)
Application Number:
PCT/JP2006/315120
Publication Date:
April 19, 2007
Filing Date:
July 31, 2006
Export Citation:
Assignee:
HINOODA SHIN-ICHI (JP)
International Classes:
G01N35/08; B81C99/00; G01N37/00
Domestic Patent References:
| WO2001013127A1 | 2001-02-22 |
Foreign References:
| JP2005031070A | 2005-02-03 | |||
| JP2006053064A | 2006-02-23 |
Other References:
HONG C.-C. ET AL: "Disposable air-bursting detonators as an alternative on-chip power source", MICRO ELECTRO MECHANICAL SYSTEMS 2002, 20 January 2002 (2002-01-20) - 24 January 2002 (2002-01-24), pages 240 - 243, XP003010996
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