Title:
MICRO THERMOELECTRIC TYPE GAS SENSOR
Document Type and Number:
WIPO Patent Application WO/2005/088285
Kind Code:
A1
Abstract:
A micro thermoelectric gas sensor comprising a thermoelectric transducer, a microheater, a catalyst layer formed on the microheater and heated by the latter and acting as a catalyst for catalytic combustion of combustible gas, and a sensor detector having an electrode pattern for these components and formed on a membrane of predetermined thickness; and a method of forming such micropattern in a state in which the microstructure of a functional material for catalysts or resistors is held under control at a predetermined position on a substrate.
Inventors:
SHIN WOOSUCK (JP)
IZU NORIYA (JP)
MATSUBARA ICHIRO (JP)
MURAYAMA NORIMITSU (JP)
TAJIMA KAZUKI (JP)
QIU FABIN (JP)
IZU NORIYA (JP)
MATSUBARA ICHIRO (JP)
MURAYAMA NORIMITSU (JP)
TAJIMA KAZUKI (JP)
QIU FABIN (JP)
Application Number:
PCT/JP2005/004657
Publication Date:
September 22, 2005
Filing Date:
March 16, 2005
Export Citation:
Assignee:
NAT INST OF ADVANCED IND SCIEN (JP)
SHIN WOOSUCK (JP)
IZU NORIYA (JP)
MATSUBARA ICHIRO (JP)
MURAYAMA NORIMITSU (JP)
TAJIMA KAZUKI (JP)
QIU FABIN (JP)
SHIN WOOSUCK (JP)
IZU NORIYA (JP)
MATSUBARA ICHIRO (JP)
MURAYAMA NORIMITSU (JP)
TAJIMA KAZUKI (JP)
QIU FABIN (JP)
International Classes:
G01N25/32; G01N33/00; (IPC1-7): G01N25/32
Foreign References:
| JP2001099801A | 2001-04-13 | |||
| JP2929789B2 | 1999-08-03 | |||
| JPH1026594A | 1998-01-27 | |||
| JP2000275203A | 2000-10-06 | |||
| JP2003255594A | 2003-09-10 |
Attorney, Agent or Firm:
Sudo, Masahiko (6-1 Nihonbashi-Muromachi 1-chom, Chuo-ku Tokyo 22, JP)
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