MICROELECTROMECHANICAL FLEXIBLE MEMBRANE ELECTROSTATIC VALVE DEVICE AND RELATED FABRICATION METHODS

WIPO Patent Application WO2002022492

A3

A MEMS valve device driven by electrostatic forces is provided. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. In another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane.

GOODWIN-JOHANSSON SCOTT H (US)
MCGUIRE GARY E (US)

PCT/US2001/028608

August 01, 2002

September 14, 2001

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MCNC (US)
GOODWIN-JOHANSSON SCOTT H (US)
MCGUIRE GARY E (US)

B81B3/00; B81B7/04; B81C1/00; F15C5/00; F16K15/16; F16K31/02; F16K99/00; (IPC1-7): B81B3/00; F16J3/02; F15C5/00

EP0435237A1	1991-07-03
EP0829649A2	1998-03-18
GB2334000A	1999-08-11
US5441597A	1995-08-15
CH677136A5	1991-04-15
US5759870A	1998-06-02

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