Title:
MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE INCLUDING AN ANALOG OR A DIGITAL
Document Type and Number:
WIPO Patent Application WO2002067293
Kind Code:
A9
Abstract:
The microelectromechanical system (MEMS) analog isolator (10) or digital isolator (210) may be created in which an actuator (12, 212) such as an electrostatic motor (66, 68) drives a beam (20, 220) against an opposing force set or predefined force set, for example, by another electrostatic motor. Motion of the beam may be sensed by a sensor (18, 218) also attached to the beam. The beam itself is electrically isolated between the locations of the actuator and the sensor. The structure may be incorporated into integrated circuits to provide on-chip isolation. In a MEMS device, a specific beam (312) is supported by transverse arms (314, 316, 318) which have flexible terminations resulting in either the selective biasing to the beam or mechanical advantage in the sensing of beam structure. Additionally, a MEMS device may be created to have reduced noise sensitivity.
Inventors:
ANNIS JEFFREY R
DUMMERMUTH ERNST H
HARRIS RICHARD D
HERBERT PATRICK C
KNIESER MICHAEL J
KRETSCHMANN ROBERT J
LARSSON HENRIC
MORRIS WINFRED L
YAO JUN J
DUMMERMUTH ERNST H
HARRIS RICHARD D
HERBERT PATRICK C
KNIESER MICHAEL J
KRETSCHMANN ROBERT J
LARSSON HENRIC
MORRIS WINFRED L
YAO JUN J
Application Number:
PCT/US2002/004824
Publication Date:
April 01, 2004
Filing Date:
February 20, 2002
Export Citation:
Assignee:
ROCKWELL AUTOMATION TECH INC (US)
International Classes:
B81B7/02; B81B3/00; G01P15/13; G01R15/20; G01R17/08; G01R19/20; G05B19/07; H01H59/00; H03H9/46; (IPC1-7): H01H59/00; B81B7/00; G01R27/28; H01L29/96; H02K41/02
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