Title:
MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS
Document Type and Number:
WIPO Patent Application WO2001001025
Kind Code:
A3
Abstract:
A method of fabricating an elastomeric structure, comprising : forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
Inventors:
UNGER MARC A (US)
CHOU HOU-PU (US)
THORSEN TODD A (US)
SCHERER AXEL (US)
QUAKE STEPHEN R (US)
CHOU HOU-PU (US)
THORSEN TODD A (US)
SCHERER AXEL (US)
QUAKE STEPHEN R (US)
Application Number:
PCT/US2000/017740
Publication Date:
July 19, 2001
Filing Date:
June 27, 2000
Export Citation:
Assignee:
CALIFORNIA INST OF TECHN (US)
UNGER MARC A (US)
CHOU HOU PU (US)
THORSEN TODD A (US)
SCHERER AXEL (US)
QUAKE STEPHEN R (US)
UNGER MARC A (US)
CHOU HOU PU (US)
THORSEN TODD A (US)
SCHERER AXEL (US)
QUAKE STEPHEN R (US)
International Classes:
B01L3/00; B81B1/00; G03F7/20; B81B3/00; B81B7/00; B81C1/00; B81C99/00; C12Q1/68; F04B17/00; F04B35/04; F04B43/04; F15C5/00; F16K7/00; F16K17/02; F16K99/00; (IPC1-7): F04B43/04; F15C5/00
Foreign References:
| EP0779436A2 | 1997-06-18 | |||
| EP0703364A1 | 1996-03-27 | |||
| EP0829360A2 | 1998-03-18 | |||
| EP0592094A2 | 1994-04-13 |
Other References:
DUFFY, D. C. ET AL.: "Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)", ANAL. CHEM., vol. 70, 1998, pages 4974 - 4984, XP002149044
DUFFY D C ET AL: "PATTERNING ELECTROLUMINESCENT MATERIALS WITH FEATURE SIZES AS SMALL AS 5 MUM USING ELASTOMERIC MEMBRANES AS MASKS FOR DRY LIFT-OFF", ADVANCED MATERIALS,DE,VCH VERLAGSGESELLSCHAFT, WEINHEIM, vol. 11, no. 7, 7 May 1999 (1999-05-07), pages 546 - 552, XP000849014, ISSN: 0935-9648
XIA, Y., WHITESIDES, G. M.: "Soft Lithography", ANGEW. CHEM. INT. ED., vol. 37, 1998, pages 550 - 575, XP002149045
BRYZEK J ET AL: "MICROMACHINES ON THE MARCH", IEEE SPECTRUM,US,IEEE INC. NEW YORK, vol. 31, no. 5, 1 May 1994 (1994-05-01), pages 20 - 31, XP000456261, ISSN: 0018-9235
QIN D ET AL: "ELASTOMERIC LIGHT VALVES", ADVANCED MATERIALS,DE,VCH VERLAGSGESELLSCHAFT, WEINHEIM, vol. 9, no. 5, 1 April 1997 (1997-04-01), pages 407 - 410, XP000683891, ISSN: 0935-9648
GERHARTZ W.; YAMAMOTO Y. S.: "Ullmann's Encyclopedia for Industrial Chemistry", WEINHEIM, VCH VERLAG.; DE, 1985, XP002149046
XIA Y ET AL: "MICROMOLDING OF POLYMERS IN CAPILLARIES: APPLICATIONS IN MICROFABRICATION", CHEMISTRY OF MATERIALS,AMERICAN CHEMICAL SOCIETY, WASHINGTON,US, vol. 8, no. 7, 1 July 1996 (1996-07-01), pages 1558 - 1567, XP000626885, ISSN: 0897-4756
SCHUELLER O J A ET AL: "Fabrication of glassy carbon microstructures by soft lithography", SENSORS AND ACTUATORS A,CH,ELSEVIER SEQUOIA S.A., LAUSANNE, vol. 72, no. 2, 19 January 1999 (1999-01-19), pages 125 - 139, XP004155654, ISSN: 0924-4247
DONG QIN ET AL: "Photolithography with transparent reflective photomasks", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B,US,AMERICAN INSTITUTE OF PHYSICS. NEW YORK, vol. 16, no. 1, January 1998 (1998-01-01), pages 98 - 103, XP002133156, ISSN: 0734-211X
JUNG, D. R., CZANDERNA, A. W.: "Chemical and Physical Interactions at Metal/Self-Assembled Organic Monolayer Interfaces", CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, vol. 19, no. 1, 1994, XP000955639
MALUF, NADIM: "An Introduction to Microelectromechanical Systems Engineering", ARTECH HOUSE PUBLISHERS, BOSTON LONDON, XP002157476
DUFFY D C ET AL: "PATTERNING ELECTROLUMINESCENT MATERIALS WITH FEATURE SIZES AS SMALL AS 5 MUM USING ELASTOMERIC MEMBRANES AS MASKS FOR DRY LIFT-OFF", ADVANCED MATERIALS,DE,VCH VERLAGSGESELLSCHAFT, WEINHEIM, vol. 11, no. 7, 7 May 1999 (1999-05-07), pages 546 - 552, XP000849014, ISSN: 0935-9648
XIA, Y., WHITESIDES, G. M.: "Soft Lithography", ANGEW. CHEM. INT. ED., vol. 37, 1998, pages 550 - 575, XP002149045
BRYZEK J ET AL: "MICROMACHINES ON THE MARCH", IEEE SPECTRUM,US,IEEE INC. NEW YORK, vol. 31, no. 5, 1 May 1994 (1994-05-01), pages 20 - 31, XP000456261, ISSN: 0018-9235
QIN D ET AL: "ELASTOMERIC LIGHT VALVES", ADVANCED MATERIALS,DE,VCH VERLAGSGESELLSCHAFT, WEINHEIM, vol. 9, no. 5, 1 April 1997 (1997-04-01), pages 407 - 410, XP000683891, ISSN: 0935-9648
GERHARTZ W.; YAMAMOTO Y. S.: "Ullmann's Encyclopedia for Industrial Chemistry", WEINHEIM, VCH VERLAG.; DE, 1985, XP002149046
XIA Y ET AL: "MICROMOLDING OF POLYMERS IN CAPILLARIES: APPLICATIONS IN MICROFABRICATION", CHEMISTRY OF MATERIALS,AMERICAN CHEMICAL SOCIETY, WASHINGTON,US, vol. 8, no. 7, 1 July 1996 (1996-07-01), pages 1558 - 1567, XP000626885, ISSN: 0897-4756
SCHUELLER O J A ET AL: "Fabrication of glassy carbon microstructures by soft lithography", SENSORS AND ACTUATORS A,CH,ELSEVIER SEQUOIA S.A., LAUSANNE, vol. 72, no. 2, 19 January 1999 (1999-01-19), pages 125 - 139, XP004155654, ISSN: 0924-4247
DONG QIN ET AL: "Photolithography with transparent reflective photomasks", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B,US,AMERICAN INSTITUTE OF PHYSICS. NEW YORK, vol. 16, no. 1, January 1998 (1998-01-01), pages 98 - 103, XP002133156, ISSN: 0734-211X
JUNG, D. R., CZANDERNA, A. W.: "Chemical and Physical Interactions at Metal/Self-Assembled Organic Monolayer Interfaces", CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, vol. 19, no. 1, 1994, XP000955639
MALUF, NADIM: "An Introduction to Microelectromechanical Systems Engineering", ARTECH HOUSE PUBLISHERS, BOSTON LONDON, XP002157476
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