Title:
MICROFABRICATED TUNING FORK GYROSCOPE AND ASSOCIATED THREE-AXIS INERTIAL MEASUREMENT SYSTEM TO SENSE OUT-OF-PLANE ROTATION
Document Type and Number:
WIPO Patent Application WO2001022094
Kind Code:
A3
Abstract:
A micromechanical tuning fork gyroscope comprises an input axis (38) which is out-of-plane of the structure, parallel capacitor strips (42, 43) beneath a pair of apertured, planar proof masses (10) suspended from a substrate (22) by a support structure (16), wherein the proof masses are set in opposed vibrational motion by an electrostatic comb drive (12, 14), whereby in response to an input angular rate, the proof masses (10) translate with respect to the striped capacitors (42, 43), thereby varying the capacitance between the strips and the proof masses as a function of the input rate.
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Inventors:
WEINBERG MARC S
BERNSTEIN JONATHAN J
KIRKOS GREGORY A
LEE TOMMY W
PETROVICH ANTHONY
BERNSTEIN JONATHAN J
KIRKOS GREGORY A
LEE TOMMY W
PETROVICH ANTHONY
Application Number:
PCT/US2000/040841
Publication Date:
November 08, 2001
Filing Date:
September 07, 2000
Export Citation:
Assignee:
DRAPER LAB CHARLES S (US)
International Classes:
G01C19/56; H01L29/84; (IPC1-7): G01C19/00
Foreign References:
| US5757103A | 1998-05-26 | |||
| US5016072A | 1991-05-14 |
Other References:
See also references of EP 1216397A4
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