Title:
MICROFABRICATION DEVICE FOR METAL PRODUCT, AND MICROFABRICATION METHOD FOR METAL PRODUCT
Document Type and Number:
WIPO Patent Application WO/2020/256132
Kind Code:
A1
Abstract:
The present invention pertains to a microfabrication device and a microfabrication method by which products of the same or greater precision can be obtained as when using an electroforming method, etc., the device and the method being such that a plate 320 that is to become a metal product is affixed to a flat portion of a holder 300, the affixed plate 320 is covered by a first resist film 330, a first photomask and the holder 300 covered by the first resist film 330 are aligned using a mark 310 formed on the holder 300, the holder 300 is illuminated in the aligned state, the plate 320 of the illuminated holder 300 is etched, the residual resist film after etching is peeled from the plate 320, the plate 320 from which the residual resist film was peeled is covered by a second resist film, and a second photomask and the holder 300 covered by the second resist film are aligned in a mode that reproduces the abovementioned alignment.
Inventors:
NAKABAYASHI MIYOSHI (JP)
Application Number:
PCT/JP2020/024208
Publication Date:
December 24, 2020
Filing Date:
June 19, 2020
Export Citation:
Assignee:
UNITED PRECISION TECH CO LTD (JP)
International Classes:
B81C99/00; B81C1/00; G01R1/067; H01R43/16
Foreign References:
| JP2002333728A | 2002-11-22 | |||
| JP2012080004A | 2012-04-19 | |||
| JP2015152577A | 2015-08-24 | |||
| JPS55133549A | 1980-10-17 | |||
| JP2000162241A | 2000-06-16 |
Attorney, Agent or Firm:
YAMAUCHI, Hiroaki et al. (JP)
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