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Title:
MICROFLUID CONTROL FOR WAVEGUIDE OPTICAL SWITCHES, VARIABLE ATTENUATORS, AND OTHER OPTICAL DEVICES
Document Type and Number:
WIPO Patent Application WO2002069016
Kind Code:
A3
Abstract:
Devices utilize elements carried by a fluid (4506) in a microchannel (4504) to switch, attenuate, shutter, filter, or phase shift optical signals. In certain embodiments, a microchannel carries a gaseous or liquid slug that interacts with at least a portion of the optical power of an optical signal traveling through a waveguide (4510, 4512). The microchannel may form part of the cladding of the waveguide, part of the core and the cladding, or part of the core only. The microchannel may also have ends or may be configured as a loop or continuous channel. The fluid devices may be self-latching or may be semi-latching. The fluid in the microchannel is moved using e.g., electrocapillarity, differential-pressure electrocapillarity, electrowetting, continuous electrowetting, electrophoresis, electroosmosis, dielectrophoresis, electrohydrodynamic electrohydrodynamic pumping, thermocapillary, thermal expansion, dielectric pumping, and/or variable dielectric pumping.

Inventors:
TICKNOR ANTHONY J
KENNEY JOHN T
VACCA GIACOMO
SAVILLE DUDLEY A
PURCHASE KEN G
Application Number:
PCT/US2002/006325
Publication Date:
May 08, 2003
Filing Date:
February 28, 2002
Export Citation:
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Assignee:
LIGHTWAVE MICROSYSTEMS CORP (US)
International Classes:
B01F13/00; B01L3/00; F04B19/00; G02B6/35; G02B26/02; (IPC1-7): G02B26/02
Foreign References:
US6195478B12001-02-27
US5956005A1999-09-21
DE19711564A11998-10-01
US4505539A1985-03-19
Other References:
TOGO H ET AL: "Multi-element thermo-capillary optical switch and sub-nanoliter oil injection for its fabrication", MICRO ELECTRO MECHANICAL SYSTEMS, 1999. MEMS '99. TWELFTH IEEE INTERNATIONAL CONFERENCE ON ORLANDO, FL, USA 17-21 JAN. 1999, PISCATAWAY, NJ, USA,IEEE, US, 17 January 1999 (1999-01-17), pages 418 - 423, XP010321696, ISBN: 0-7803-5194-0
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