Title:
MICROFLUIDIC CHIP AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2022/195968
Kind Code:
A1
Abstract:
A technique is provided for suitably protecting the electrodes of a microfluidic chip. This microfluidic chip (1) comprises a substrate (10), an electrode (31), an insulating film (33) and a fluid storage unit (20). The electrode (31) is arranged in the top surface of the substrate (10). The insulating film (33) covers the top surface of the electrode (31). The insulating film (33) is configured from an oxide film obtained by oxidizing the metal contained in the electrode (31), or an nitride film obtained by nitriding the metal contained in the electrode (31). The fluid storage unit (20) can store a fluid above the insulating film (33).
Inventors:
URAKAWA SATOSHI (JP)
Application Number:
PCT/JP2021/043457
Publication Date:
September 22, 2022
Filing Date:
November 26, 2021
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
G01N37/00; B01J19/00; C12M1/26; C12N13/00; G01N1/04; G01N27/02
Domestic Patent References:
| WO2015025946A1 | 2015-02-26 | |||
| WO2014207617A1 | 2014-12-31 |
Foreign References:
| JP2013068546A | 2013-04-18 | |||
| JP2015522247A | 2015-08-06 | |||
| JP2016523187A | 2016-08-08 | |||
| US20100224493A1 | 2010-09-09 |
Attorney, Agent or Firm:
NISHIDA Takami (JP)
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