MICROMACHINE AND METHOD OF MANUFACTURING THE MICROMACHINE

Title:

MICROMACHINE AND METHOD OF MANUFACTURING THE MICROMACHINE

Document Type and Number:

WIPO Patent Application WO/2004/011366

Kind Code:

A1

Abstract:

A micromachine (20) for a high frequency filter having a high Q value and a high frequency band, comprising an input electrode (7b), an output electrode (7a), and a support electrode (7c) installed on a substrate (4), and a band-shaped vibrator electrode (15) formed by laying a beam (vibration part)(16) on the upper part of the output electrode (7a) through a clearance part (A) in the state of supporting both end parts thereof on the input electrode (7b) and the substrate (4) through the support electrode (7c), wherein the both end parts of the vibrator electrode (15) are completely fixed to the input electrode (7b) and the support electrode (7c) on the entire surface thereof ranging from the tip to the beam (16) thereof.

Inventors:

TADA MASAHIRO (JP)
KINOSHITA TAKASHI (JP)
TANIGUCHI TAKESHI (JP)
IKEDA KOICHI (JP)

Application Number:

PCT/JP2003/008905

Publication Date:

February 05, 2004

Filing Date:

July 14, 2003

Export Citation:

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Assignee:

SONY CORP (JP)
TADA MASAHIRO (JP)
KINOSHITA TAKASHI (JP)
TANIGUCHI TAKESHI (JP)
IKEDA KOICHI (JP)

International Classes:

B81B3/00; B81C1/00; H03H3/007; H03H9/02; H03H9/24; H03H9/46; (IPC1-7): B81B3/00; B81C1/00

Foreign References:

JPH07333077A	1995-12-22
JPH05343943A	1993-12-24
JPH08219795A	1996-08-30
EP0962999A2	1999-12-08

Other References: