Title:
MICROMACHINE VIBRATION FILTER
Document Type and Number:
WIPO Patent Application WO/2003/069720
Kind Code:
A1
Abstract:
A small-sized and high-performance mechanical vibration filter adapted to a high-frequency band. A mechanical adapter is made up of a microcylindrical beam (5) to increase the mechanical resonance frequency, and the microcylindrical beams (5) are arranged in an array. Common sensing electrodes (6) are disposed around the microcylindrical beams (5) with predetermined intervals to suppress a fall of an output signal. The vibration of a part of the mechanical vibrators is constricted to enable the observation and removal of the noise component accompanying the direct electromagnetic coupling from the input signal to the output signal.
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Inventors:
NAKAMURA KUNIHIKO (JP)
NAKANISHI YOSHITO (JP)
NAKANISHI YOSHITO (JP)
Application Number:
PCT/JP2003/000981
Publication Date:
August 21, 2003
Filing Date:
January 31, 2003
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD (JP)
NAKAMURA KUNIHIKO (JP)
NAKANISHI YOSHITO (JP)
NAKAMURA KUNIHIKO (JP)
NAKANISHI YOSHITO (JP)
International Classes:
B81B3/00; H01P1/12; H01P1/20; H01P1/201; H03H3/007; H03H9/02; H03H9/24; H03H9/46; H03H9/50; (IPC1-7): H01P1/20; B06B1/02; H03H5/12; H03H7/12; H03H9/00
Foreign References:
JPS473459A | ||||
JPS6295331U | 1987-06-18 |
Other References:
See also references of EP 1475856A4
Attorney, Agent or Firm:
Zogo, Masahiro (7 Kojimachi 5-chom, Chiyoda-ku Tokyo, JP)
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