Title:
MICROMACHINED ACOUSTIC EJECTORS AND APPLICATIONS
Document Type and Number:
WIPO Patent Application WO2000007735
Kind Code:
A3
Abstract:
Disclosed are micromachined acoustic ejector (12) for generating a jet stream (24) using a Helmholtz resonator (14), applications for the ejector (12) in microflight, active heat sinking and fluid pumping, and methods of manufacturing the resonator (14) and ejector device (12). The resonator (14) comprises a resonant diaphragm (26) and a drive electrode (28) to operate on a volume inside a cavity (30) of the resonator (14). The resonance frequency of the resonator (14) is correlated or matched to the resonance of the cavity (30). The volume is forced out of the resonator (14) through a throat (40), with the throat (40) being variable through the use of another diaphragm (48). A shroud (16) and a cover (18) can direct flow to the resonator (14). An array (102) of the ejectors (12) can be fabricated. A heater (44) can vary the resonance inside the cavity (30), and another diaphragm (46) can vary the geometry of the cavity (30).
Inventors:
NAJAFI KHALIL (US)
BERNAL LUIS P (US)
AMIRPARVIZ BABAK (US)
BERNAL LUIS P (US)
AMIRPARVIZ BABAK (US)
Application Number:
PCT/US1999/017652
Publication Date:
June 02, 2000
Filing Date:
August 04, 1999
Export Citation:
Assignee:
UNIV MICHIGAN (US)
NAJAFI KHALIL (US)
BERNAL LUIS P (US)
AMIRPARVIZ BABAK (US)
NAJAFI KHALIL (US)
BERNAL LUIS P (US)
AMIRPARVIZ BABAK (US)
International Classes:
F04B19/00; F04F7/00; F15C5/00; (IPC1-7): B05B1/08
Foreign References:
| US5096388A | 1992-03-17 | |||
| US5758823A | 1998-06-02 | |||
| US4474251A | 1984-10-02 | |||
| US4492338A | 1985-01-08 | |||
| US5710395A | 1998-01-20 | |||
| US4858717A | 1989-08-22 | |||
| US4753579A | 1988-06-28 |
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