Title:
MICROMACHINED INERTIAL SENSOR DEVICES
Document Type and Number:
WIPO Patent Application WO/2011/016859
Kind Code:
A3
Abstract:
A micromachined inertial sensor (200) with a single proof-mass (201) or measuring 6-degree-of-motions. The single proof-mass (201) includes a frame (202), an x-axis proof mass section (212a, 212b) attached to the frame by a first flexure, and a y-axis proof mass section (218) attached to the frame (202) by a second flexure (228a, 228b). The single proof-mass (201) is formed in a micromachined structural layer and is adapted to measure angular rates about three axes with a single drive motion and linear accelerations about the three axes.
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Inventors:
ACAR CENK (US)
Application Number:
PCT/US2010/002166
Publication Date:
April 21, 2011
Filing Date:
August 04, 2010
Export Citation:
Assignee:
ACAR CENK (US)
International Classes:
B81B7/02; B81C1/00; G01C19/5719; G01P15/18
Domestic Patent References:
| WO2008059757A1 | 2008-05-22 |
Foreign References:
| EP1860402A1 | 2007-11-28 | |||
| EP1688705A2 | 2006-08-09 | |||
| US20030061878A1 | 2003-04-03 |
Other References:
See also references of EP 2462408A4
Attorney, Agent or Firm:
PARK, Chung (Sunnyvale, California, US)
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